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Deposition Characteristics of SiN Thin Film Deposited by Applying the Chucking Function in a Mono Polar ESC Heater.

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Bibliographic Details
Title:	Deposition Characteristics of SiN Thin Film Deposited by Applying the Chucking Function in a Mono Polar ESC Heater.
Authors:	Lee, Baek-Ju¹
Source:	Coatings (2079-6412); Mar2026, Vol. 16 Issue 3, p302, 17p
Database:	Applied Science & Technology Source
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Description
ISSN:	20796412
DOI:	10.3390/coatings16030302