APA (7th ed.) Citation

Lee, B. (2026). Deposition Characteristics of SiN Thin Film Deposited by Applying the Chucking Function in a Mono Polar ESC Heater. Coatings (2079-6412), 16(3), 302. https://doi.org/10.3390/coatings16030302

Chicago Style (17th ed.) Citation

Lee, Baek-Ju. "Deposition Characteristics of SiN Thin Film Deposited by Applying the Chucking Function in a Mono Polar ESC Heater." Coatings (2079-6412) 16, no. 3 (2026): 302. https://doi.org/10.3390/coatings16030302.

MLA (9th ed.) Citation

Lee, Baek-Ju. "Deposition Characteristics of SiN Thin Film Deposited by Applying the Chucking Function in a Mono Polar ESC Heater." Coatings (2079-6412), vol. 16, no. 3, 2026, p. 302, https://doi.org/10.3390/coatings16030302.