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Superresolution patterning in g-line photoresist and silicon assisted by direct-laser-written Ge10Sb90 heat-mode resist film.

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Bibliographic Details
Title: Superresolution patterning in g-line photoresist and silicon assisted by direct-laser-written Ge10Sb90 heat-mode resist film.
Authors: Shen, Juntao1,2, Zhang, Kui1,2, zkui1939@163.com, Liu, Wenbo1,3, Wei, Jingsong1,2, weijingsong@siom.ac.cn, Wang, Yang1,2, ywang@siom.ac.cn
Source: Materials Science in Semiconductor Processing; Jul2026, Vol. 209, pN.PAG-N.PAG, 1p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 193058692
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Superresolution patterning in g-line photoresist and silicon assisted by direct-laser-written Ge10Sb90 heat-mode resist film.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Shen%2C+Juntao%22">Shen, Juntao</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Zhang%2C+Kui%22">Zhang, Kui</searchLink><relatesTo>1,2</relatesTo>, <i>zkui1939@163.com</i><br /><searchLink fieldCode="AU" term="%22Liu%2C+Wenbo%22">Liu, Wenbo</searchLink><relatesTo>1,3</relatesTo><br /><searchLink fieldCode="AU" term="%22Wei%2C+Jingsong%22">Wei, Jingsong</searchLink><relatesTo>1,2</relatesTo>, <i>weijingsong@siom.ac.cn</i><br /><searchLink fieldCode="AU" term="%22Wang%2C+Yang%22">Wang, Yang</searchLink><relatesTo>1,2</relatesTo>, <i>ywang@siom.ac.cn</i>
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  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Materials+Science+in+Semiconductor+Processing%22">Materials Science in Semiconductor Processing</searchLink>; Jul2026, Vol. 209, pN.PAG-N.PAG, 1p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=193058692
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1016/j.mssp.2026.110637
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 1
        StartPage: N.PAG
    Titles:
      – TitleFull: Superresolution patterning in g-line photoresist and silicon assisted by direct-laser-written Ge10Sb90 heat-mode resist film.
        Type: main
  BibRelationships:
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      – PersonEntity:
          Name:
            NameFull: Shen, Juntao
      – PersonEntity:
          Name:
            NameFull: Zhang, Kui
      – PersonEntity:
          Name:
            NameFull: Liu, Wenbo
      – PersonEntity:
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            NameFull: Wei, Jingsong
      – PersonEntity:
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            NameFull: Wang, Yang
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      – BibEntity:
          Dates:
            – D: 01
              M: 07
              Text: Jul2026
              Type: published
              Y: 2026
          Identifiers:
            – Type: issn-print
              Value: 13698001
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            – Type: volume
              Value: 209
          Titles:
            – TitleFull: Materials Science in Semiconductor Processing
              Type: main
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