Numerical Simulation of Flow Characteristics and Structural Optimization of a Chemical Vapor Deposition Furnace for Tantalum on Porous Foam Carbon.

Saved in:
Bibliographic Details
Title: Numerical Simulation of Flow Characteristics and Structural Optimization of a Chemical Vapor Deposition Furnace for Tantalum on Porous Foam Carbon.
Authors: Hu, Jiangdi1,2, Wang, Shuang1,2, Cai, Hongzhong3, Li, Fashe1,2,4, Wang, Wenchao1,2,4
Source: Applied Sciences (2076-3417); May2026, Vol. 16 Issue 9, p4095, 29p
Database: Applied Science & Technology Source
Full text is not displayed to guests.
Description
ISSN:20763417
DOI:10.3390/app16094095