Parametric study and performance evaluation of the louver structure in the pumping pipeline of electron beam evaporation coating equipment.
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| Title: | Parametric study and performance evaluation of the louver structure in the pumping pipeline of electron beam evaporation coating equipment. |
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| Authors: | Yuan, Zuhao1, Li, Yong1, She, Pengcheng1, Gong, Jun1, Shi, Renping1, He, Qiufu1, Liu, Fangting2, Li, Junhui2, lijunhui@csu.edu.cn |
| Source: | Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; May2026, Vol. 44 Issue 3, p1-12, 12p |
| Database: | Applied Science & Technology Source |
| ISSN: | 21662746 |
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| DOI: | 10.1116/6.0005283 |
