APA (7th ed.) Citation

Yuan, Z., Li, Y., She, P., Gong, J., Shi, R., He, Q., . . . Li, J. (2026). Parametric study and performance evaluation of the louver structure in the pumping pipeline of electron beam evaporation coating equipment. Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics, 44(3), 1. https://doi.org/10.1116/6.0005283

Chicago Style (17th ed.) Citation

Yuan, Zuhao, Yong Li, Pengcheng She, Jun Gong, Renping Shi, Qiufu He, Fangting Liu, and Junhui Li. "Parametric Study and Performance Evaluation of the Louver Structure in the Pumping Pipeline of Electron Beam Evaporation Coating Equipment." Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics 44, no. 3 (2026): 1. https://doi.org/10.1116/6.0005283.

MLA (9th ed.) Citation

Yuan, Zuhao, et al. "Parametric Study and Performance Evaluation of the Louver Structure in the Pumping Pipeline of Electron Beam Evaporation Coating Equipment." Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics, vol. 44, no. 3, 2026, p. 1, https://doi.org/10.1116/6.0005283.