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Parametric study and performance evaluation of the louver structure in the pumping pipeline of electron beam evaporation coating equipment.

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Title: Parametric study and performance evaluation of the louver structure in the pumping pipeline of electron beam evaporation coating equipment.
Authors: Yuan, Zuhao1, Li, Yong1, She, Pengcheng1, Gong, Jun1, Shi, Renping1, He, Qiufu1, Liu, Fangting2, Li, Junhui2, lijunhui@csu.edu.cn
Source: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; May2026, Vol. 44 Issue 3, p1-12, 12p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 193810249
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Parametric study and performance evaluation of the louver structure in the pumping pipeline of electron beam evaporation coating equipment.
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  Data: <searchLink fieldCode="AU" term="%22Yuan%2C+Zuhao%22">Yuan, Zuhao</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Li%2C+Yong%22">Li, Yong</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22She%2C+Pengcheng%22">She, Pengcheng</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Gong%2C+Jun%22">Gong, Jun</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Shi%2C+Renping%22">Shi, Renping</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22He%2C+Qiufu%22">He, Qiufu</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Liu%2C+Fangting%22">Liu, Fangting</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Li%2C+Junhui%22">Li, Junhui</searchLink><relatesTo>2</relatesTo>, <i>lijunhui@csu.edu.cn</i>
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PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=193810249
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1116/6.0005283
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 12
        StartPage: 1
    Titles:
      – TitleFull: Parametric study and performance evaluation of the louver structure in the pumping pipeline of electron beam evaporation coating equipment.
        Type: main
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      – PersonEntity:
          Name:
            NameFull: Yuan, Zuhao
      – PersonEntity:
          Name:
            NameFull: Li, Yong
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            NameFull: She, Pengcheng
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            NameFull: Gong, Jun
      – PersonEntity:
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            NameFull: Shi, Renping
      – PersonEntity:
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            NameFull: He, Qiufu
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            NameFull: Liu, Fangting
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            NameFull: Li, Junhui
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          Dates:
            – D: 01
              M: 05
              Text: May2026
              Type: published
              Y: 2026
          Identifiers:
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              Value: 21662746
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              Value: 44
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              Value: 3
          Titles:
            – TitleFull: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics
              Type: main
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