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Parametric study and performance evaluation of the louver structure in the pumping pipeline of electron beam evaporation coating equipment.

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Bibliographic Details
Title: Parametric study and performance evaluation of the louver structure in the pumping pipeline of electron beam evaporation coating equipment.
Authors: Yuan, Zuhao1, Li, Yong1, She, Pengcheng1, Gong, Jun1, Shi, Renping1, He, Qiufu1, Liu, Fangting2, Li, Junhui2, lijunhui@csu.edu.cn
Source: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; May2026, Vol. 44 Issue 3, p1-12, 12p
Database: Applied Science & Technology Source
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