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Enhanced Ferroelectricity and Reliability in Hf0.5Zr0.5O2 Thin Film via Synergistic Stress-Interface Effects from a W Top Electrode.

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Bibliographic Details
Title:	Enhanced Ferroelectricity and Reliability in Hf0.5Zr0.5O2 Thin Film via Synergistic Stress-Interface Effects from a W Top Electrode.
Authors:	Wang, Dao¹, Zhang, Yan², 2022076@htu.edu.cn, Xu, Fan³, Wang, Xin-Yuan², Lu, Zi-Hao², Fu, Hui-Wen¹, He, Dan-Feng¹
Source:	Journal of Electronic Materials; Jul2026, Vol. 55 Issue 7, p5807-5816, 10p
Database:	Applied Science & Technology Source

Description
ISSN:	03615235
DOI:	10.1007/s11664-026-12815-z