High-Power Impulse Magnetron Sputter Deposition of Ultrathick Amorphous Carbon.
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| Title: | High-Power Impulse Magnetron Sputter Deposition of Ultrathick Amorphous Carbon. |
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| Authors: | Engwall-Holmes, A. M.1, engwall1@llnl.gov, Bayu Aji, L. B.1, Shin, S. J.1, Merlo, J. B.1, Bae, J. H.2, Kucheyev, S. O.1 |
| Source: | Fusion Science & Technology; Jul2026, Vol. 82 Issue 5, p947-955, 9p |
| Database: | Applied Science & Technology Source |
| ISSN: | 15361055 |
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| DOI: | 10.1080/15361055.2025.2502890 |
