Efficacy of ECR-CVD silicon nitride passivation in InGaP/GaAs HBTs.
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| Title: | Efficacy of ECR-CVD silicon nitride passivation in InGaP/GaAs HBTs. |
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| Authors: | Zoccal, L. B.1, Diniz, J. A.1, Doi, I.1, Swart, J. W.1, Daltrini, A. M.2, daltrini@led.unicamp.br, Moshkalyov, S. A.2 |
| Source: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; Jul/Aug2006, Vol. 24 Issue 4, p1762-1765, 4p, 1 Diagram, 1 Chart, 5 Graphs |
| Database: | Applied Science & Technology Source |
| ISSN: | 10711023 |
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| DOI: | 10.1116/1.2209998 |
