Prediction of clamping pressure in a Johnsen-Rahbek-type electrostatic chuck based on circuit simulation.
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| Title: | Prediction of clamping pressure in a Johnsen-Rahbek-type electrostatic chuck based on circuit simulation. |
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| Authors: | Kanno, S.1, kanno-s@crl.hitachi.co.jp, Kato, K.2, Yoshioka, K.3, Nishio, R.3, Tsubone, T.3 |
| Source: | Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; Jan/Feb2006, Vol. 24 Issue 1, p216-223, 8p, 4 Diagrams, 2 Charts, 10 Graphs |
| Database: | Applied Science & Technology Source |
| ISSN: | 10711023 |
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| DOI: | 10.1116/1.2151219 |
