APA (7th ed.) Citation

Kanno, S., Kato, K., Yoshioka, K., Nishio, R., & Tsubone, T. (2006). Prediction of clamping pressure in a Johnsen-Rahbek-type electrostatic chuck based on circuit simulation. Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures, 24(1), 216. https://doi.org/10.1116/1.2151219

Chicago Style (17th ed.) Citation

Kanno, S., K. Kato, K. Yoshioka, R. Nishio, and T. Tsubone. "Prediction of Clamping Pressure in a Johnsen-Rahbek-type Electrostatic Chuck Based on Circuit Simulation." Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures 24, no. 1 (2006): 216. https://doi.org/10.1116/1.2151219.

MLA (9th ed.) Citation

Kanno, S., et al. "Prediction of Clamping Pressure in a Johnsen-Rahbek-type Electrostatic Chuck Based on Circuit Simulation." Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures, vol. 24, no. 1, 2006, p. 216, https://doi.org/10.1116/1.2151219.