Influence of nucleation parameters in the spatial distribution of the Ge nanocrystals formed by LPCVD
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| Title: | Influence of nucleation parameters in the spatial distribution of the Ge nanocrystals formed by LPCVD |
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| Authors: | Marins, E.S.1,2, Mestanza, S.N.M.2, Doi, I.1,2, ioshiaki@fee.unicamp.br |
| Source: | Materials Science in Semiconductor Processing; Aug2006, Vol. 9 Issue 4/5, p828-831, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 13698001 |
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| DOI: | 10.1016/j.mssp.2006.08.019 |
