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Influence of nucleation parameters in the spatial distribution of the Ge nanocrystals formed by LPCVD

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Bibliographic Details
Title: Influence of nucleation parameters in the spatial distribution of the Ge nanocrystals formed by LPCVD
Authors: Marins, E.S.1,2, Mestanza, S.N.M.2, Doi, I.1,2, ioshiaki@fee.unicamp.br
Source: Materials Science in Semiconductor Processing; Aug2006, Vol. 9 Issue 4/5, p828-831, 4p
Database: Applied Science & Technology Source
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