Development of Silicon Photonics Devices Using Microelectronic Tools for the Integration on Top of a CMOS Wafer.

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Bibliographic Details
Title: Development of Silicon Photonics Devices Using Microelectronic Tools for the Integration on Top of a CMOS Wafer.
Authors: Fedeli, J. M.1, jean-marc.fedeli@cea.fr, Di Cioccio, L.1, Marris-Morini, D.2, Vivien, L.2, Orobtchouk, R.3, Rojo-Romeo, P.4, Seassal, C.4, Mandorlo, F.1,4
Source: Advances in Optical Technologies; 2008 Special Issue 1, p1-15, 15p, 8 Color Photographs, 8 Black and White Photographs, 4 Diagrams, 1 Chart, 8 Graphs
Database: Applied Science & Technology Source
Description
ISSN:16876393
DOI:10.1155/2008/412518