Zinc-containing silica films: a spin-on diffusion source for zinc in InP.
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| Title: | Zinc-containing silica films: a spin-on diffusion source for zinc in InP. |
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| Authors: | Schade, U., Unger, B. |
| Source: | Semiconductor Science & Technology; December 1993, Vol. 8, p2048-2052, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 02681242 |
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| DOI: | 10.1088/0268-1242/8/12/002 |
