APA (7th ed.) Citation

Schade, U., & Unger, B. (1993). Zinc-containing silica films: A spin-on diffusion source for zinc in InP. Semiconductor Science & Technology, 8, 2048. https://doi.org/10.1088/0268-1242/8/12/002

Chicago Style (17th ed.) Citation

Schade, U., and B. Unger. "Zinc-containing Silica Films: A Spin-on Diffusion Source for Zinc in InP." Semiconductor Science & Technology 8 (1993): 2048. https://doi.org/10.1088/0268-1242/8/12/002.

MLA (9th ed.) Citation

Schade, U., and B. Unger. "Zinc-containing Silica Films: A Spin-on Diffusion Source for Zinc in InP." Semiconductor Science & Technology, vol. 8, 1993, p. 2048, https://doi.org/10.1088/0268-1242/8/12/002.