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Zinc-containing silica films: a spin-on diffusion source for zinc in InP.

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Bibliographic Details
Title: Zinc-containing silica films: a spin-on diffusion source for zinc in InP.
Authors: Schade, U., Unger, B.
Source: Semiconductor Science & Technology; December 1993, Vol. 8, p2048-2052, 5p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500192602
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Zinc-containing silica films: a spin-on diffusion source for zinc in InP.
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  Data: <searchLink fieldCode="AU" term="%22Schade%2C+U%2E%22">Schade, U.</searchLink><br /><searchLink fieldCode="AU" term="%22Unger%2C+B%2E%22">Unger, B.</searchLink>
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  Data: <searchLink fieldCode="JN" term="%22Semiconductor+Science+%26+Technology%22">Semiconductor Science & Technology</searchLink>; December 1993, Vol. 8, p2048-2052, 5p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500192602
RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1088/0268-1242/8/12/002
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      – Code: eng
        Text: English
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      Pagination:
        PageCount: 5
        StartPage: 2048
    Titles:
      – TitleFull: Zinc-containing silica films: a spin-on diffusion source for zinc in InP.
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            NameFull: Schade, U.
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            NameFull: Unger, B.
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          Dates:
            – D: 01
              M: 12
              Text: December 1993
              Type: published
              Y: 1993
          Identifiers:
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              Value: 02681242
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              Value: 8
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            – TitleFull: Semiconductor Science & Technology
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