Characterization of AZ PN114 resist for soft-x-ray projection lithography.
Saved in:
| Title: | Characterization of AZ PN114 resist for soft-x-ray projection lithography. |
|---|---|
| Authors: | Early, K., Tennant, D. M., Jeon, D. Y. |
| Source: | Applied Optics; December 1 1993, Vol. 32, p7044-7049, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036935 |
|---|---|
| DOI: | 10.1364/AO.32.007044 |
