Atomic force microscopy observation of Si(100) surface after hydrogen annealing.
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| Title: | Atomic force microscopy observation of Si(100) surface after hydrogen annealing. |
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| Authors: | Yanase, Y., Horie, H., Oka, Y. |
| Source: | Journal of the Electrochemical Society; November 1994, Vol. 141, p3259-3263, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00134651 |
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| DOI: | 10.1149/1.2059315 |
