Wear resistance of N+-implanted silicon investigated by scanning probe microscopy.
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| Title: | Wear resistance of N+-implanted silicon investigated by scanning probe microscopy. |
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| Authors: | Miyamoto, T., Yokohata, T., Miyake, S. |
| Source: | Journal of Tribology; October 1995, Vol. 117, p612-616, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 07424787 |
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| DOI: | 10.1115/1.2831524 |
