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Wear resistance of N+-implanted silicon investigated by scanning probe microscopy.

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Bibliographic Details
Title: Wear resistance of N+-implanted silicon investigated by scanning probe microscopy.
Authors: Miyamoto, T., Yokohata, T., Miyake, S.
Source: Journal of Tribology; October 1995, Vol. 117, p612-616, 5p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500334504
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
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RecordInfo BibRecord:
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      – Type: doi
        Value: 10.1115/1.2831524
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      – Code: eng
        Text: English
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        PageCount: 5
        StartPage: 612
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      – TitleFull: Wear resistance of N+-implanted silicon investigated by scanning probe microscopy.
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          Name:
            NameFull: Miyamoto, T.
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            NameFull: Yokohata, T.
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            NameFull: Miyake, S.
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            – D: 01
              M: 10
              Text: October 1995
              Type: published
              Y: 1995
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              Value: 117
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