Ellipsometric scatterometry for the metrology of sub-0.1μm-linewidth structures.
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| Title: | Ellipsometric scatterometry for the metrology of sub-0.1μm-linewidth structures. |
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| Authors: | Minhas, Babar K., Coulombe, Stephen A., Naqvi, S. Sohail H. |
| Source: | Applied Optics; August 1 1998, Vol. 37 Issue 22, p5112-5115, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036935 |
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| DOI: | 10.1364/AO.37.005112 |
