APA (7th ed.) Citation

Minhas, B. K., Coulombe, S. A., & Naqvi, S. S. H. (1998). Ellipsometric scatterometry for the metrology of sub-0.1μm-linewidth structures. Applied Optics, 37(22), 5112. https://doi.org/10.1364/AO.37.005112

Chicago Style (17th ed.) Citation

Minhas, Babar K., Stephen A. Coulombe, and S. Sohail H. Naqvi. "Ellipsometric Scatterometry for the Metrology of Sub-0.1μm-linewidth Structures." Applied Optics 37, no. 22 (1998): 5112. https://doi.org/10.1364/AO.37.005112.

MLA (9th ed.) Citation

Minhas, Babar K., et al. "Ellipsometric Scatterometry for the Metrology of Sub-0.1μm-linewidth Structures." Applied Optics, vol. 37, no. 22, 1998, p. 5112, https://doi.org/10.1364/AO.37.005112.