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Ellipsometric scatterometry for the metrology of sub-0.1μm-linewidth structures.

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Bibliographic Details
Title: Ellipsometric scatterometry for the metrology of sub-0.1μm-linewidth structures.
Authors: Minhas, Babar K., Coulombe, Stephen A., Naqvi, S. Sohail H.
Source: Applied Optics; August 1 1998, Vol. 37 Issue 22, p5112-5115, 4p
Database: Applied Science & Technology Source
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