Control of double diffusion front unintentionally penetrated from a Zn doped InP layer during metalorganic vapor phase epitaxy.
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| Title: | Control of double diffusion front unintentionally penetrated from a Zn doped InP layer during metalorganic vapor phase epitaxy. |
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| Authors: | Otsuka, N., Kito, M., Ishino, M. |
| Source: | Journal of Applied Physics; October 15 1998, Vol. 84 Issue 8, p4239-4247, 9p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.368696 |