Doppler spectroscopic measurements of sheath ion velocities in radio-frequency plasmas.
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| Title: | Doppler spectroscopic measurements of sheath ion velocities in radio-frequency plasmas. |
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| Authors: | Woodcock, B. K., Busby, J. R., Freegarde, T. G. M. |
| Source: | Journal of Applied Physics; May 1 1997, Vol. 81, p5945-5949, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.364382 |
