Fabrication of lateral npn- and pnp-structures on Si/SiGe by focused laser beam writing and their application as photodetectors.
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| Title: | Fabrication of lateral npn- and pnp-structures on Si/SiGe by focused laser beam writing and their application as photodetectors. |
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| Authors: | Engel, C., Baumgartner, P., Holzmann, M. |
| Source: | Journal of Applied Physics; May 1 1997, Vol. 81, p6455-6460, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.364428 |
