Effects of CH4 addition to Ar-O2 discharge gases on resistivity and structure of ITO coatings.
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| Title: | Effects of CH4 addition to Ar-O2 discharge gases on resistivity and structure of ITO coatings. |
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| Authors: | Kusano, E., Kashiwagi, N., Kobayashi, T. |
| Source: | Vacuum; December 1998, Vol. 51 Issue 4, p785-789, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 0042207X |
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| DOI: | 10.1016/S0042-207X(98)00291-7 |
