Fabrication of ultrathin, highly uniform thin-film SOI MOSFET's with low series resistance using pattern-constrained epitaxy.
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| Title: | Fabrication of ultrathin, highly uniform thin-film SOI MOSFET's with low series resistance using pattern-constrained epitaxy. |
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| Authors: | Wong, Hon-Sum, Chan, Kevin K., Lee, Young |
| Source: | IEEE Transactions on Electron Devices; July 1997, Vol. 44, p1131-1135, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00189383 |
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| DOI: | 10.1109/16.595941 |
