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Fabrication of ultrathin, highly uniform thin-film SOI MOSFET's with low series resistance using pattern-constrained epitaxy.

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Title: Fabrication of ultrathin, highly uniform thin-film SOI MOSFET's with low series resistance using pattern-constrained epitaxy.
Authors: Wong, Hon-Sum, Chan, Kevin K., Lee, Young
Source: IEEE Transactions on Electron Devices; July 1997, Vol. 44, p1131-1135, 5p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500476548
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Fabrication of ultrathin, highly uniform thin-film SOI MOSFET's with low series resistance using pattern-constrained epitaxy.
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  Data: <searchLink fieldCode="AU" term="%22Wong%2C+Hon-Sum%22">Wong, Hon-Sum</searchLink><br /><searchLink fieldCode="AU" term="%22Chan%2C+Kevin+K%2E%22">Chan, Kevin K.</searchLink><br /><searchLink fieldCode="AU" term="%22Lee%2C+Young%22">Lee, Young</searchLink>
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  Data: <searchLink fieldCode="JN" term="%22IEEE+Transactions+on+Electron+Devices%22">IEEE Transactions on Electron Devices</searchLink>; July 1997, Vol. 44, p1131-1135, 5p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500476548
RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1109/16.595941
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      – Code: eng
        Text: English
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        PageCount: 5
        StartPage: 1131
    Titles:
      – TitleFull: Fabrication of ultrathin, highly uniform thin-film SOI MOSFET's with low series resistance using pattern-constrained epitaxy.
        Type: main
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          Name:
            NameFull: Wong, Hon-Sum
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          Name:
            NameFull: Chan, Kevin K.
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            NameFull: Lee, Young
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            – D: 01
              M: 07
              Text: July 1997
              Type: published
              Y: 1997
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              Value: 00189383
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              Value: 44
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            – TitleFull: IEEE Transactions on Electron Devices
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