Ion energy distribution in ionized dc sputtering measured by an energy-resolved mass spectrometer.
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| Title: | Ion energy distribution in ionized dc sputtering measured by an energy-resolved mass spectrometer. |
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| Authors: | Kusano, E., Kobayashi, T., Kashiwagi, N. |
| Source: | Vacuum; May 1999, Vol. 53 Issue 1-2, p21-24, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 0042207X |
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| DOI: | 10.1016/S0042-207X(98)00414-X |
