APA (7th ed.) Citation

Kusano, E., Kobayashi, T., & Kashiwagi, N. (1999). Ion energy distribution in ionized dc sputtering measured by an energy-resolved mass spectrometer. Vacuum, 53(1-2), 21. https://doi.org/10.1016/S0042-207X(98)00414-X

Chicago Style (17th ed.) Citation

Kusano, E., T. Kobayashi, and N. Kashiwagi. "Ion Energy Distribution in Ionized Dc Sputtering Measured by an Energy-resolved Mass Spectrometer." Vacuum 53, no. 1-2 (1999): 21. https://doi.org/10.1016/S0042-207X(98)00414-X.

MLA (9th ed.) Citation

Kusano, E., et al. "Ion Energy Distribution in Ionized Dc Sputtering Measured by an Energy-resolved Mass Spectrometer." Vacuum, vol. 53, no. 1-2, 1999, p. 21, https://doi.org/10.1016/S0042-207X(98)00414-X.