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Ion energy distribution in ionized dc sputtering measured by an energy-resolved mass spectrometer.

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Bibliographic Details
Title: Ion energy distribution in ionized dc sputtering measured by an energy-resolved mass spectrometer.
Authors: Kusano, E., Kobayashi, T., Kashiwagi, N.
Source: Vacuum; May 1999, Vol. 53 Issue 1-2, p21-24, 4p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500521289
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Ion energy distribution in ionized dc sputtering measured by an energy-resolved mass spectrometer.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Kusano%2C+E%2E%22">Kusano, E.</searchLink><br /><searchLink fieldCode="AU" term="%22Kobayashi%2C+T%2E%22">Kobayashi, T.</searchLink><br /><searchLink fieldCode="AU" term="%22Kashiwagi%2C+N%2E%22">Kashiwagi, N.</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Vacuum%22">Vacuum</searchLink>; May 1999, Vol. 53 Issue 1-2, p21-24, 4p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500521289
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1016/S0042-207X(98)00414-X
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 4
        StartPage: 21
    Titles:
      – TitleFull: Ion energy distribution in ionized dc sputtering measured by an energy-resolved mass spectrometer.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Kusano, E.
      – PersonEntity:
          Name:
            NameFull: Kobayashi, T.
      – PersonEntity:
          Name:
            NameFull: Kashiwagi, N.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 05
              Text: May 1999
              Type: published
              Y: 1999
          Identifiers:
            – Type: issn-print
              Value: 0042207X
          Numbering:
            – Type: volume
              Value: 53
            – Type: issue
              Value: 1-2
          Titles:
            – TitleFull: Vacuum
              Type: main
ResultId 1