Methods of defect-engineering shallow junctions formed by B+-implantation in Si.
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| Title: | Methods of defect-engineering shallow junctions formed by B+-implantation in Si. |
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| Authors: | Roth, E. G., Holland, O. W., Venezia, V. C. |
| Source: | Journal of Electronic Materials; November 1997, Vol. 26, p1349-1354, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 03615235 |
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| DOI: | 10.1007/s11664-997-0083-y |
