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Ultrashallow thermal donor formation in silicon by annealing in ambient oxygen.

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Title: Ultrashallow thermal donor formation in silicon by annealing in ambient oxygen.
Authors: Å;berg, D., Linnarsson, M. K., Svensson, B. G.
Source: Journal of Applied Physics; June 15 1999, Vol. 85 Issue 12, p8054-8059, 6p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 500545145
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Ultrashallow thermal donor formation in silicon by annealing in ambient oxygen.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Å%3Bberg%2C+D%2E%22">Å;berg, D.</searchLink><br /><searchLink fieldCode="AU" term="%22Linnarsson%2C+M%2E+K%2E%22">Linnarsson, M. K.</searchLink><br /><searchLink fieldCode="AU" term="%22Svensson%2C+B%2E+G%2E%22">Svensson, B. G.</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>; June 15 1999, Vol. 85 Issue 12, p8054-8059, 6p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500545145
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1063/1.370642
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 6
        StartPage: 8054
    Titles:
      – TitleFull: Ultrashallow thermal donor formation in silicon by annealing in ambient oxygen.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Å;berg, D.
      – PersonEntity:
          Name:
            NameFull: Linnarsson, M. K.
      – PersonEntity:
          Name:
            NameFull: Svensson, B. G.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 15
              M: 06
              Text: June 15 1999
              Type: published
              Y: 1999
          Identifiers:
            – Type: issn-print
              Value: 00218979
          Numbering:
            – Type: volume
              Value: 85
            – Type: issue
              Value: 12
          Titles:
            – TitleFull: Journal of Applied Physics
              Type: main
ResultId 1