The interaction between platinum films and silicon substrates: effects of substrate bias during sputtering deposition.
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| Title: | The interaction between platinum films and silicon substrates: effects of substrate bias during sputtering deposition. |
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| Authors: | Shi, J., Kojima, D., Hashimoto, M. |
| Source: | Journal of Applied Physics; August 1 2000, Vol. 88 Issue 3, p1679-1683, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.373871 |
