APA (7th ed.) Citation

Shi, J., Kojima, D., & Hashimoto, M. (2000). The interaction between platinum films and silicon substrates: Effects of substrate bias during sputtering deposition. Journal of Applied Physics, 88(3), 1679. https://doi.org/10.1063/1.373871

Chicago Style (17th ed.) Citation

Shi, J., D. Kojima, and M. Hashimoto. "The Interaction Between Platinum Films and Silicon Substrates: Effects of Substrate Bias During Sputtering Deposition." Journal of Applied Physics 88, no. 3 (2000): 1679. https://doi.org/10.1063/1.373871.

MLA (9th ed.) Citation

Shi, J., et al. "The Interaction Between Platinum Films and Silicon Substrates: Effects of Substrate Bias During Sputtering Deposition." Journal of Applied Physics, vol. 88, no. 3, 2000, p. 1679, https://doi.org/10.1063/1.373871.