Ion beam-assisted deposition of DLC films on PMMA and TiN/PMMA.
Saved in:
| Title: | Ion beam-assisted deposition of DLC films on PMMA and TiN/PMMA. |
|---|---|
| Authors: | Li, D. J., Cui, F. Z., Gu, H. Q. |
| Source: | Vacuum; March 2000, Vol. 56 Issue 3, p205-211, 7p |
| Database: | Applied Science & Technology Source |
| ISSN: | 0042207X |
|---|---|
| DOI: | 10.1016/S0042-207X(99)00183-9 |
