Irradiation effect of low energy nitrogen-ion beam during pulsed laser deposition process on the structural and bonding properties of carbon-nitride thin films.
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| Title: | Irradiation effect of low energy nitrogen-ion beam during pulsed laser deposition process on the structural and bonding properties of carbon-nitride thin films. |
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| Authors: | Zhao, J. P., Chen, Z. Y., Yano, T. |
| Source: | Journal of Applied Physics; February 1 2001, Vol. 89 Issue 3, p1580-1587, 8p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.1335643 |
