Al/Si contacting of ultra-shallow epitaxially grown Si and SiGe junctions.
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| Title: | Al/Si contacting of ultra-shallow epitaxially grown Si and SiGe junctions. |
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| Authors: | Ren, Q. W., Nanver, L. K., Visser, C. C. G. |
| Source: | Journal of Materials Science: Materials in Electronics; Jun2001, Vol. 12, p313-316, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 09574522 |
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