APA (7th ed.) Citation

Ren, Q. W., Nanver, L. K., & Visser, C. C. G. (2001). Al/Si contacting of ultra-shallow epitaxially grown Si and SiGe junctions. Journal of Materials Science: Materials in Electronics, 12, 313.

Chicago Style (17th ed.) Citation

Ren, Q. W., L. K. Nanver, and C. C. G. Visser. "Al/Si Contacting of Ultra-shallow Epitaxially Grown Si and SiGe Junctions." Journal of Materials Science: Materials in Electronics 12 (2001): 313.

MLA (9th ed.) Citation

Ren, Q. W., et al. "Al/Si Contacting of Ultra-shallow Epitaxially Grown Si and SiGe Junctions." Journal of Materials Science: Materials in Electronics, vol. 12, 2001, p. 313.