Cracking mechanism in AlN(112̄0)/α-Al2O3(11̄02) heteroepitaxial films growth by MOCVD.

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Bibliographic Details
Title: Cracking mechanism in AlN(112̄0)/α-Al2O3(11̄02) heteroepitaxial films growth by MOCVD.
Authors: Kaigawa, K., Shibata, T., Nakamura, Y.
Source: Journal of Materials Science; October 1 2001, Vol. 36 Issue 19, p4649-4659, 11p
Database: Applied Science & Technology Source
Description
ISSN:00222461