A new fabrication technique for optoelectronic integrated circuits (OEIC's)—the graded-step process—applied to the fabrication of AlGaAs/GaAs PIN/FET and PIN/amplifier.
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| Title: | A new fabrication technique for optoelectronic integrated circuits (OEIC's)—the graded-step process—applied to the fabrication of AlGaAs/GaAs PIN/FET and PIN/amplifier. |
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| Authors: | Wada, O., Miura, S., Machida, H. |
| Source: | Journal of the Electrochemical Society; August 1985, Vol. 132, p1996-2002, 7p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00134651 |
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| DOI: | 10.1149/1.2114268 |
