APA (7th ed.) Citation

Wada, O., Miura, S., & Machida, H. (1985). A new fabrication technique for optoelectronic integrated circuits (OEIC's)—the graded-step process—applied to the fabrication of AlGaAs/GaAs PIN/FET and PIN/amplifier. Journal of the Electrochemical Society, 132, 1996. https://doi.org/10.1149/1.2114268

Chicago Style (17th ed.) Citation

Wada, O., S. Miura, and H. Machida. "A New Fabrication Technique for Optoelectronic Integrated Circuits (OEIC's)—the Graded-step Process—applied to the Fabrication of AlGaAs/GaAs PIN/FET and PIN/amplifier." Journal of the Electrochemical Society 132 (1985): 1996. https://doi.org/10.1149/1.2114268.

MLA (9th ed.) Citation

Wada, O., et al. "A New Fabrication Technique for Optoelectronic Integrated Circuits (OEIC's)—the Graded-step Process—applied to the Fabrication of AlGaAs/GaAs PIN/FET and PIN/amplifier." Journal of the Electrochemical Society, vol. 132, 1985, p. 1996, https://doi.org/10.1149/1.2114268.