Surface Planarization of Strain-Relaxed SiGe Buffer Layers by CMP and Post Cleaning.
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| Title: | Surface Planarization of Strain-Relaxed SiGe Buffer Layers by CMP and Post Cleaning. |
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| Authors: | Sawano, K., Kawaguchi, K., Koh, S. |
| Source: | Journal of the Electrochemical Society; July 2003, Vol. 150 Issue 7, pG376-G379, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00134651 |
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| DOI: | 10.1149/1.1576773 |
