Performance of the magnetron sputtering apparatus equipped with 60 mmφ superconducting bulk magnet.
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| Title: | Performance of the magnetron sputtering apparatus equipped with 60 mmφ superconducting bulk magnet. |
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| Authors: | Mizutani, U., Hazama, H., Matsuda, T. |
| Source: | Superconductor Science & Technology; October 2003, Vol. 16 Issue 10, p1207-1211, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 09532048 |
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| DOI: | 10.1088/0953-2048/16/10/314 |
