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Performance of the magnetron sputtering apparatus equipped with 60 mmφ superconducting bulk magnet.

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Bibliographic Details
Title: Performance of the magnetron sputtering apparatus equipped with 60 mmφ superconducting bulk magnet.
Authors: Mizutani, U., Hazama, H., Matsuda, T.
Source: Superconductor Science & Technology; October 2003, Vol. 16 Issue 10, p1207-1211, 5p
Database: Applied Science & Technology Source
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