Two-temperature chemically non-equilibrium modelling of high-power Ar-N2 inductively coupled plasmas at atmospheric pressure.
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| Title: | Two-temperature chemically non-equilibrium modelling of high-power Ar-N2 inductively coupled plasmas at atmospheric pressure. |
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| Authors: | Tanaka, Yasunori |
| Source: | Journal of Physics: D Applied Physics; Apr2004, Vol. 37 Issue 8, p1190-1205, 16p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00223727 |
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| DOI: | 10.1088/0022-3727/37/8/007 |